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1

Handbook of Silicon Wafer Cleaning Technology || Metal Surface Chemical Composition and Morphology

Year:

2018

Language:

english

File:

PDF, 2.00 MB

english, 2018

2

Multistack structure for an extreme-ultraviolet pellicle with out-of-band radiation reduction

Lee, Sung-Gyu, Kim, Guk-Jin, Kim, In-Seon, Ahn, Jin-Ho, Park, Jin-Goo, Oh, Hye-Keun

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2015

Language:

english

File:

PDF, 1.49 MB

english, 2015

3

Effects of Drying Methods and Wettability of Silicon on the Formation of Water Marks in Semiconductor Processing

Journal:

Journal of The Electrochemical Society

Year:

1995

Language:

english

File:

PDF, 1.07 MB

english, 1995

4

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Extreme Ultraviolet (EUV) Lithography VIII - Impact of non-uniform wrinkles for a multi-stack pellicle in EUV lithography

Panning, Eric M., Goldberg, Kenneth A., Kim, Guk-Jin, Kim, In-Seon, Yeung, Michael, Kim, Min-Su, Park, Jin-Goo, Oh, Hye-Keun

Year:

2017

Language:

english

File:

PDF, 870 KB

english, 2017

5

P-77: Area-Selective Atomic Layer Deposition Using Inkjet-printed Fluorocarbon Patterns as Mask Layers

Cho, Young-In, Yu, Jun-Ho, Yoon, Dai Geon, Park, Jin-Goo, Choi, Kyung Hyun, Lee, Sang-Ho

Journal:

SID Symposium Digest of Technical Papers

Year:

2018

Language:

english

File:

PDF, 1.20 MB

english, 2018

6

A Breakthrough Method for the Effective Conditioning of PVA Brush Used for Post-CMP Process

Lee, Jung-Hwan, Ryu, Heon-Yul, Hwang, Jun-Kil, Yerriboina, Nagendra Prasad, Kim, Tae-Gon, Hamada, Satomi, Wada, Yutaka, Hiyama, Hirokuni, Park, Jin-Goo

Journal:

ECS Journal of Solid State Science and Technology

Year:

2019

Language:

english

File:

PDF, 1.87 MB

english, 2019

7

Fabrication of Nano- and Micro-Scale UV Imprint Stamp Using Diamond-Like Carbon Coating Technology

Lee, Eung-Sug, Jeong, Jun-Ho, Kim, Ki-Don, Sim, Young-Suk, Choi, Dae-Geun, Choi, Junhyuk, Park, Sang-Hu, Lim, Tae-Woo, Yang, Dong-Yol, Cha, Nam-Goo, Park, Jin-Goo, Lee, Wi-Ro

Journal:

Journal of Nanoscience and Nanotechnology

Year:

2006

File:

PDF, 251 KB

2006

8

Characterization of TMAH based cleaning solution for post Cu-CMP application

R. Prasanna Venkatesh, Tae-Young Kwon, Y. Nagendra Prasad, S. Ramanathan, Jin-Goo Park

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.06 MB

english, 2013

9

Removal of UV-cured resin using a hybrid cleaning process for nanoimprint lithography

Kim, Min-Su, Kang, Bong-Kyun, Ramachandran, Manivannan, Kim, Jae-Kwan, Lee, Byung-Kyu, Park, Jin-Goo

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.52 MB

english, 2014

10

Abrasive and additive interactions in high selectivity STI CMP slurries

Praveen, B.V.S., Manivannan, R., Umashankar, T.D., Cho, Byoung-Jun, Park, Jin-Goo, Ramanathan, S.

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.11 MB

english, 2014

11

Experimental and Analytical Study of Submicrometer Particle Removal from Deep Trenches

Bakhtari, Kaveh, Guldiken, Rasim O., Busnaina, Ahmed A., Park, Jin-Goo

Journal:

Journal of The Electrochemical Society

Year:

2006

Language:

english

File:

PDF, 556 KB

english, 2006

12

Large-Scale Plasma Patterning of Transparent Graphene Electrode on Flexible Substrates

Kim, Ji Hye, Ko, Euna, Hwang, Joonki, Pham, Xuan-Hung, Lee, Joo Heon, Lee, Sung Hwan, Tran, Van-Khue, Kim, Jong-Ho, Park, Jin-Goo, Choo, Jaebum, Han, Kwi Nam, Seong, Gi Hun

Journal:

Year:

2015

Language:

english

File:

PDF, 2.24 MB

english, 2015

13

Effect of Wettability of Poly Silicon on CMP Behavior

Kang, Young-Jae, Kang, Bong-Kyun, Kim, In-Kwon, Park, Jin-Goo, Hong, Yi-Koan, Han, Sang-Yeob, Yun, Seong-Kyu, Yoon, Bo-Un, Hong, Chang-Ki

Journal:

MRS Proceedings

Year:

2007

Language:

english

File:

PDF, 334 KB

english, 2007

14

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Surface Preparation in CMP Process; Post CMP Cleaning and Defects

Park, Jin-Goo, Kim, Tae-Gon

Year:

2007

Language:

english

File:

PDF, 763 KB

english, 2007

15

Dimensionally controlled complex 3D sub-micron pattern fabrication by single step dual diffuser lithography (DDL)

Hafeez, Hassan, Ryu, Heon-Yul, An, Il Sin, Oh, Hye-Keun, Ahn, Jin-Ho, Park, Jin-Goo

Journal:

Microelectronic Engineering

Year:

2015

Language:

english

File:

PDF, 1.86 MB

english, 2015

16

Effect of Corrosion Inhibitor, Benzotriazole, in Cu Slurry on Cu Polishing

Kim, In-Kwon, Kang, Young-Jae, Kim, Tae-Gon, Park, Jin-Goo

Journal:

Japanese Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 1.39 MB

english, 2008

17

Effect of lanthanum doping in ceria abrasives on chemical mechanical polishing selectivity for shallow trench isolation

Praveen, B.V.S., Cho, Byoung-Jun, Park, Jin-Goo, Ramanathan, S.

Journal:

Materials Science in Semiconductor Processing

Year:

2015

Language:

english

File:

PDF, 2.68 MB

english, 2015

18

The Effect of Hydrogen Peroxide on Frictional and Thermal Behaviors in a Citric Acid-Based Copper Chemical Mechanical Planarization Slurry

Eom, Dae-Hong, Kim, In-Kwon, Kang, Young-Jae, Park, Jin-Goo

Journal:

Japanese Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 713 KB

english, 2008

19

Critical dimension variation caused by wrinkle in extreme ultra-violet pellicle for 3-nm node

Kim, Guk-Jin, Kim, In-Seon, Lee, Sung-Gyu, Yeung, Michael, Kim, Min-Su, Park, Jin-Goo, Oh, Hye-Keun

Journal:

Japanese Journal of Applied Physics

Year:

2017

Language:

english

File:

PDF, 3.49 MB

english, 2017

20

Thermodynamics of Aluminum, Nitrogen and AlN formation in Liquid Iron

Kim, Wan-Yi, Kang, Jin-Goo, Park, Chul-Hwan, Lee, Joong-Beom, Pak, Jong-Jin

Journal:

ISIJ International

Year:

2007

Language:

english

File:

PDF, 2.12 MB

english, 2007

21

Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents

Kim, Min-Su, Purushothaman, Muthukrishnan, Kim, Hyun-Tae, Song, Hee-Jin, Kim, Young-Woong, Ahn, Jin-Ho, Oh, Hye-Keun, Park, Jin-Goo

Journal:

Colloids and Surfaces A: Physicochemical and Engineering Aspects

Year:

2018

Language:

english

File:

PDF, 1.79 MB

english, 2018

22

Selection of CVD Diamond Crystal Size on a CVD Pad Conditioner for Improved Lifetime

Ryu, Heon-Yul, Kim, Ji-Woo, Hyun, Da-Bin, Kim, Yeo-Ho, Lee, Jung-Hwan, Park, Jin-Goo

Journal:

Electronic Materials Letters

Year:

2019

Language:

english

File:

PDF, 1.34 MB

english, 2019

23

Study on possible root causes of contamination from an incoming PVA brush during post-CMP cleaning

Lee, Jung-Hwan, Purushothaman, Muthukrishnan, Han, Kwang-Min, Ryu, Heon-Yul, Yerriboina, Nagendra Prasad, Kim, Tae-Gon, Wada, Yutaka, Hamada, Satomi, Hiyama, Hirokuni, Park, Jin-Goo

Journal:

Polymer Testing

Year:

2019

Language:

english

File:

PDF, 2.04 MB

english, 2019

24

The Adhesion and Removal Mechanism of Ceria Particles for STI Post-CMP Cleaning Process

Yerriboina, Nagendra Prasad, Sahir, Samrina, Han, So-Young, Han, Kwang-Min, Park, Jin-Goo

Journal:

ECS Transactions

Year:

2019

Language:

english

File:

PDF, 533 KB

english, 2019

25

Hybrid DHF and N2 jet spray cleaning for silicon nitride and metal layer DRAM patterns

An, Kook-Hyun, Yerriboina, Nagendra Prasad, Poddar, Maneesh Kumar, Kim, Tae-Gon, Lee, Dong-Kyu, Jung, Tae-Hoon, Lee, Jin-Ho, Lee, Hun-Hee, Park, Jin-Goo

Journal:

Microelectronic Engineering

Year:

2020

File:

PDF, 1.54 MB

2020

26

Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process

Lee, Jung-Hwan, Poddar, Maneesh Kumar, Han, Kwang-Min, Ryu, Heon-Yul, Yerriboina, Nagendra Prasad, Kim, Tae-Gon, Wada, Yutaka, Hamada, Satomi, Hiyama, Hirokuni, Park, Jin-Goo

Journal:

Polymer Testing

Year:

2020

File:

PDF, 1.82 MB

2020

27

Tungsten passivation layer (WO3) formation mechanisms during chemical mechanical planarization in the presence of oxidizers

Poddar, Maneesh Kumar, Jalalzai, Palwasha, Sahir, Samrina, Yerriboina, Nagendra Prasad, Kim, Tae-Gon, Park, Jin-Goo

Journal:

Applied Surface Science

Year:

2021

File:

PDF, 159 KB

2021

28

Synthesis of Fe metal precipitated colloidal silica and its application to W chemical mechanical polishing (CMP) slurry

Young-Jae Kang, Y. Nagendra Prasad, In-Kwon Kim, Seok-Jo Jung, Jin-Goo Park

Journal:

Journal of Colloid and Interface Science

Year:

2010

Language:

english

File:

PDF, 975 KB

english, 2010

29

Effects of size, humidity, and aging on particle removal from Si wafers

Tae-Gon Kim, Young-Sam Yoo, Seung-Ho Lee, Jin-Goo Park

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 509 KB

english, 2009

30

Adhesion force change on multilayer EUVL mask due to laser induced plasma shock wave

Tae-Gon Kim, Young-Sam Yoo, Jinho Ahn, Jong-Myoung Lee, Jae-Sung Choi, Ahmed A. Busnaina, Jin-Goo Park

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 590 KB

english, 2009

31

Preparation and characterization of perfluoro-organic thin films on aluminium

Sang-Ho Lee, Myong-Jong Kwon, Jin-Goo Park, Yong-Kweon Kim, Hyung-Jae Shin

Journal:

Surface and Coatings Technology

Year:

1999

Language:

english

File:

PDF, 221 KB

english, 1999

32

Effect of processing parameters, antistiction coatings, and polymer type when injection molding microfeatures

Sung-Hwan Yoon, Nam-Goo Cha, Jun S. Lee, Jin-Goo Park, David J. Carter, Joey L. Mead, Carol M.F. Barry

Journal:

Polymer Engineering & Science

Year:

2010

Language:

english

File:

PDF, 406 KB

english, 2010

33

Fabrication of a hydrophobic/hydrophilic hybrid-patterned microarray chip and its application to a cancer marker immunoassay

Moonkwon Lee, Ki Hyung Kim, Jin-Goo Park, Jung-Hwan Lee, Hyun-Woo Lim, Min-Yi Park, Soo-Ik Chang, Eun Kyu Lee, Dong Woo Lim, Jaebum Choo

Journal:

BioChip Journal

Year:

2012

Language:

english

File:

PDF, 333 KB

english, 2012

34

Chemical, optical and tribological characterization of perfluoropolymer films as an anti-stiction layer in micro-mirror arrays

Kang-Kuk Lee, Nam-Goo Cha, Joon-Sung Kim, Jin-Goo Park, Hyung-Jae Shin

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 396 KB

english, 2000

35

A self-assembled monolayer-based micropatterned array for controlling cell adhesion and protein adsorption

Dong Jin Kim, Jong Min Lee, Jin-Goo Park, Bong Geun Chung

Journal:

Biotechnology and Bioengineering

Year:

2011

Language:

english

File:

PDF, 734 KB

english, 2011

36

Development of CO2 gas cluster cleaning method and its characterization

Hoomi Choi, Hojoong Kim, Deokjoo Yoon, Jong W. Lee, Bong-Kyun Kang, Min-Su Kim, Jin-Goo Park, Soon-Bark Kwon, Taesung Kim

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 710 KB

english, 2013

37

Influence of anionic polyelectrolyte addition on ceria dispersion behavior for quartz chemical mechanical polishing

Hyuk-Min Kim, R. Prasanna Venkatesh, Tae-Young Kwon, Jin-Goo Park

Journal:

Colloids and Surfaces A: Physicochemical and Engineering Aspects

Year:

2012

Language:

english

File:

PDF, 1.04 MB

english, 2012

38

Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates

Kim, Hyuk-Min, Manivannan, R., Moon, Deog-Ju, Xiong, Hailin, Park, Jin-Goo

Journal:

Year:

2013

Language:

english

File:

PDF, 727 KB

english, 2013

39

Role of mask patterns in fabrication of Si nanotip arrays

Lee, Jung-Hwan, Cho, Si-Hyeong, Park, Jin-Goo

Journal:

Micro & Nano Letters

Year:

2013

Language:

english

File:

PDF, 498 KB

english, 2013

40

Development of inlaid electrodes for whole column electrochemical detection in HPLC

Seo, Jung-Ho, Leow, Pei Ling, Cho, Si-Hyeong, Lim, Hyun-Woo, Kim, Jin-Young, Patel, Bhavik Anil, Park, Jin-Goo, O'Hare, Danny

Journal:

Year:

2009

Language:

english

File:

PDF, 1.33 MB

english, 2009

41

The Surface Modification with Fluorocarbon Thin Films for the Prevention of Stiction in Mems

Lee, Sang-Ho, Kwon, Myong-Jong, Park, Jin-Goo, Kim, Yong-Kweon, Shin, Hyung-Jae

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 367 KB

english, 1998

42

Enhancement of airborne shock wave by laser-induced breakdown of liquid column in laser shock cleaning

Jang, Deoksuk, Park, Jin-Goo, Kim, Dongsik

Journal:

Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 1.13 MB

english, 2011

43

Effect of Silicon Dioxide Hardness on Scratches in Interlevel Dielectric Chemical–Mechanical Polishing

Kwon, Tae-Young, Cho, Byoung-Jun, Venktesh, R. Prasanna, Ramachandran, Manivannan, Kim, Hyuk-Min, Hong, Chang-Ki, Park, Jin-Goo

Journal:

Tribology Transactions

Year:

2014

Language:

english

File:

PDF, 833 KB

english, 2014

44

Scratch formation and its mechanism in chemical mechanical planarization (CMP)

Tae-Young Kwon,Manivannan Ramachandran,Jin-Goo Park

Journal:

Year:

2013

Language:

english

File:

PDF, 2.60 MB

english, 2013

45

The impact of diamond conditioners on scratch formation during chemical mechanical planarization (CMP) of silicon dioxide

Kwon, Tae-Young, Ramachandran, Manivannan, Cho, Byoung-Jun, Busnaina, Ahmed A., Park, Jin-Goo

Journal:

Tribology International

Year:

2013

Language:

english

File:

PDF, 2.36 MB

english, 2013

46

Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83MHz megasonic of interest to wafer cleaning

Kang, Bong-Kyun, Kim, Min-Su, Park, Jin-Goo

Journal:

Ultrasonics Sonochemistry

Year:

2014

Language:

english

File:

PDF, 1.63 MB

english, 2014

47

Obituary.

Kang, Bong-Kyun, Kim, Min-Su, Park, Jin-Goo

Journal:

Year:

1892

Language:

english

File:

PDF, 405 KB

english, 1892

48

On the mechanism of material removal by fixed abrasive lapping of various glass substrates

Cho, Byoung-Jun, Kim, Hyuk-Min, Manivannan, R., Moon, Deog-Ju, Park, Jin-Goo

Journal:

Year:

2013

Language:

english

File:

PDF, 2.44 MB

english, 2013

49

Vacancies.

Cho, Byoung-Jun, Kim, Hyuk-Min, Manivannan, R., Moon, Deog-Ju, Park, Jin-Goo

Journal:

Year:

1930

Language:

english

File:

PDF, 206 KB

english, 1930

50

Fluorocarbon film-assisted fabrication of a CoNi mold with high aspect ratio for nanoimprint lithography

Muhammad, Rizwan, Cho, Si-Hyeong, Lee, Jung-Hwan, Park, Jin-Goo

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.02 MB

english, 2013

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